School personnel information

写真b

MIDOH Yoshihiro


Keyword

LSI, Scanning Electron Miscroscope, Defect Detection, Image Processing, Electron Tomography, Equilibrium Research

Mail Address

Mail Address

URL

http://www-ise3.ise.eng.osaka-u.ac.jp/~midoh

Gender

Male

Organization 【 display / non-display

  • 2006.04.01 - 2007.05.31, Department of Information Systems Engineering, Graduate School of Information Science and Technology, Specially Appointed Researcher

  • 2007.06.01 - , Department of Information Systems Engineering, Graduate School of Information Science and Technology, Assistant Professor

Education 【 display / non-display

Osaka University Faculty of Engineering  Graduated 2001.03
Osaka University Graduate School, Division of Information Science  Completed 2003.03
Osaka University Graduate School, Division of Information Science  Completed 2006.03

Employment Record 【 display / non-display

Specially Appointed Researcher, Graduate School of Information Science and Technology, Osaka University 2006.04 - 2007.05
Assistante Professor, Graduate School of Information Science and Technology, Osaka University 2007.06 -

Research topics 【 display / non-display

  • With shrinking LSI design rules, it is more difficult to assure sufficient accuracy in measurement and inspection due to noise and low-resolution of Scanning Electron Microscope (SEM) images. I try to develop a novel method for pattern measurement and defect inspection using super-resolution techniques and a matching method between reference and test SEM images with deep subpixel accuracy.

    Measurement engineering-related, Electron device and electronic equipment-related

  • As the dimensions of integrated circuit devices continue to shrink, the effect of line edge roughness (LER) of resist patterns on the device performance is becoming a serious problem. We try to estimate statistically a wavelet that is matched to measure LER from the scanning electron microscopy (SEM) signal profile.
    Measurement engineering-related

Academic Society Membership 【 display / non-display

  • Japan Society for Equilibrium Research

  • SPIE

  • The institute of Electronics, Information and Communication Engineers

  • the Japan Society of Applied Physics

 

Academic Papers 【 display / non-display

  • Image quality enhancement of a CD-SEM image using conditional generative adversarial networks, Y. Midoh and K. Nakamae,SPIE Advanced Lithography 2019,10959-10, 2019.02, International Conference(Proceedings)

  • A Note on Image Analysis and Anomaly Detection Using Deep Learning, Yoshihiro Midoh, Koji Nakamae, The journal of Reliability Engineering Association of Japan,40(2) 81-86, 2018.03, Papers(In Japanese)

  • Image quality improvement for a single SEM image using convolutional neural network, Satoshi Miyake, Yoshihiro Midoh, Koji Nakamae, The Proceeding of the 36th Nano Testing Symposium , 119-124, 2016.11, Conference Report / Oral Presentation (In Japanese)

  • Mitochondria detection method for electron microscope images of serial sections using a machine learning, Kenta Adachi, Yoshihiro Midoh, Koji Nakamae, The Proceeding of the 36th Nano Testing Symposium , 143-148, 2016.11, Conference Report / Oral Presentation (In Japanese)

  • Automatic cell image segmentation for screening in cell culture, Kosuke Arita, Yoshihiro Midoh, Koji Nakamae, The Proceeding of the 36th Nano Testing Symposium , 137-141, 2016.11, Conference Report / Oral Presentation (In Japanese)

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Conference management 【 display / non-display

  • International Conference, Nano Testing Symposium, Secretariat, 2018.11

  • International Conference, Nano Testing Symposium, Secretariat, 2017.11

  • International Conference, Nano Testing Symposium, Secretariat, 2016.11

  • International Conference, Nano Testing Symposium, Secretariat, 2015.11

  • International Conference, Nano Testing Symposium, 2014.11