School personnel information

写真b

ENDOU Masayuki


Organization 【 display / non-display

  • 2009.09.01 - 2013.03.31, The Institute of Scientific and Industrial Research, Specially Appointed Professor

  • 2014.06.16 - 2017.03.31, Division of Sustainable Energy and Environmental Engineering, Graduate School of Engineering, Specially Appointed Researcher

  • 2017.04.01 - , The Institute of Scientific and Industrial Research, Specially Appointed Researcher

 

Academic Papers 【 display / non-display

  • Theoretical study on structural effects of polymer ionization for EUV resist, M.Endo,S.Tagawa,2012 SPIE conference, San Jose, California, USA, 2012, 2/12-16, 2012.02, International Conference(Proceedings)

  • Theoretical Study of Ionization of Polymers for EUV Resist, M.Endo,S.Tagawa,24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan, 2011, 10/24-27, 2011.10, International Conference(Proceedings)

  • Theoretical evaluation of polymer bound photoacid generators for EUV resist, M.Endo,S.Tagawa,2011 International Symposium on Extreme Ultraviolet Lithography, Miami, Florida, USA, 2011, 10/17-19, 2011.10, International Conference(Non Proceeding)

  • Theoretical Study of Photoacid Generators for Extreme Ultraviolet Resists, Masayuki Endo and Seiichi Tagawa, Japanese Journal of Applied Physics,50 06GD04/1-06GD04/4 , 2011.06, Papers

  • Theoretical Study on Reactivity of Photoacid Generators for EUV Lithography, Masayuki Endo and Seiichi Tagawa, J. Photopolym. Sci. Technol.,24 205-210 , 2011.06, Papers

display all >>