School personnel information

写真b

ISOBE Michirou


Organization 【 display / non-display

  • 2008.04.01 - 2010.03.31, School of Engineering, Technical Staff

  • 2013.12.16 - 2014.12.31, Center for Atomic and Molecular Technologies, Graduate School of Engineering, Specially Appointed Researcher

  • 2015.01.16 - , Center for Atomic and Molecular Technologies, Graduate School of Engineering, Specially Appointed Researcher

 

Academic Papers 【 display / non-display

  • Molecular dynamics simulations of atomic-layer etching (ALE) of SiO2, Yuki Okada, Michiro Isobe, Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi,39th International Symposium on Dry Process, 2017.11, International Conference(Proceedings)