School personnel information

写真b

Nakajima Ayako


Organization 【 display / non-display

  • 2018.08.01 - , The Institute of Scientific and Industrial Research, Assistant Professor

 

Academic Papers 【 display / non-display

  • Fundamental study on dissolution kinetics of poly(4-hydroxystyrene) for development of high-resolution resists, A. Nakajima, K. Watanabe, K. Matsuoka, T. Kozawa, Y. Komuro, D. Kawana, A. Yamazaki,SPIE ADVANCED LITHOGRAPHY 2019, 2019.02, International Conference(Proceedings)

  • Fundamental study on dissolution kinetics of poly(4-hydroxystyrene) for development of high-resolution resists, A. Nakajima, K. Watanabe, K. Matsuoka, T. Kozawa, Y. Komuro, D. Kawana, A. Yamazaki,SPIE ADVANCED LITHOGRAPHY 2019, 2019.02, International Conference(Proceedings)

  • Dependence of relationship between chemical gradient and line width roughness of zirconia nanoparticle resist on pattern duty, acid generator, and developer, T. Kozawa, A. Nakajima, T. Yamada, Y. Muroya, J. J. Santillan, and T. Itani, Jpn. J. Appl. Phys. ,58 036501, 2019.02, Papers

  • Dependence of relationship between chemical gradient and line width roughness of zirconia nanoparticle resist on pattern duty, acid generator, and developer, T. Kozawa, A. Nakajima, T. Yamada, Y. Muroya, J. J. Santillan, and T. Itani, Jpn. J. Appl. Phys. ,58 036501, 2019.02, Papers

  • Effects of molecular weight and dispersity on performance of main-chain-scission-type resist, Ayako Nakajima, Manabu Hoshino, Masakazu Hashimoto, and Takahiro Kozawa, Jpn. J. Appl. Phys. ,58 020909, 2019.01, Papers

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