School personnel information

写真b

MUROYA Yusa


Keyword

Radiation chemistry & engineering

Mail Address

Mail Address

URL

http://www.sanken.osaka-u.ac.jp/labs/bms/

Gender

Male

Organization 【 display / non-display

  • 2012.06.01 - 2012.12.31, The Institute of Scientific and Industrial Research, Associate Professor

  • 2013.01.01 - , The Institute of Scientific and Industrial Research, Associate Professor

Education 【 display / non-display

The University of Tokyo Faculty of Engineering  Graduated 1998.03
The University of Tokyo Graduate School, Division of Engineering  Completed 2000.03
The University of Tokyo Graduate School, Division of Engineering  Unfinished 2001.05
The University of Tokyo Graduate School, Division of Engineering  Completed 2007.02

Employment Record 【 display / non-display

Research associate, Faculty of Engineering, Univ. of Tokyo 2001.05 - 2007.03
Assistant Prof., School of Engineering, Univ. of Tokyo 2007.04 - 2012.05
Visiting Lecturer, Research Institute for Science and Engineering, Waseda Univ. 2008.04 - 2012.03
Specially Appointed Associate Professor, Research Institute of Scientific and Industrial Research, Osaka Univ. 2012.06 - 2012.12
Associate Professor, Research Institute of Scientific and Industrial Research, Osaka Univ. 2013.01 -

Research topics 【 display / non-display

  • Radiation chemistry of liquids, Fast reaction kinetics at extreme conditions up to supercritical regime, Water chemistry
    Fundamental physical chemistry-related, Green sustainable chemistry and environmental chemistry-related, Nuclear engineering-related

 

Academic Papers 【 display / non-display

  • Analysis of line-and-space patterns of ZrO2 nanoparticle resist on the basis of EUV sensitization mechanism, T. Kozawa, T. Yamada, Y. Muroya, J. J. Santillan, T. Itani,SPIE ADVANCED LITHOGRAPHY 2019, 2019.02, Conference Report / Oral Presentation

  • Dependence of relationship between chemical gradient and line width roughness of zirconia nanoparticle resist on pattern duty, acid generator, and developer, T. Kozawa, A. Nakajima, T. Yamada, Y. Muroya, J. J. Santillan, and T. Itani, Jpn. J. Appl. Phys. ,58 036501, 2019.02, Papers

  • Dependence of relationship between chemical gradient and line width roughness of zirconia nanoparticle resist on pattern duty, acid generator, and developer, T. Kozawa, A. Nakajima, T. Yamada, Y. Muroya, J. J. Santillan, and T. Itani, Jpn. J. Appl. Phys. ,58 036501, 2019.02, Papers

  • Observation of dissociative quasifree electron attachment to nucleoside via excited anion radical in solution, Jun Ma, Anil Kumar, Yusa Muroya, Shinichi Yamashita, Tsuneaki Sakurai, Sergey A. Denisov, Michael D. Sevilla, Amitava Adhikary, Shu Seki, Mehran Mostafavi, Nat. Commun.,10 102, 2019.01, Papers

  • PWR secondary water chemistry guidelines in Japan - Purpose and technical background., Hirotaka Kawamura, Yasuhiko Shoda, Takumi Terachi, Yosuke Katsumura, Shunsuke Uchida, Takayuki Mizuno, Yusa Muroya, Yasuo Tsuzuki, Ryuji Umehara, Hideo Hirano, Takao Nishimura., Prog. Nucl. Energ.,114 121-137, 2019.01, Papers

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